Nowadays, the improvement and development of Multi-media and information & communication technology is rapidly processed. They need large data storage capacity. So that, many studies and researches in data storage have been carried out. According to them, the data storage capacity has been increased. But the limitation of storage capacity is happened for several problems. One of them is spot & pit size in optical and magnetic data storage and another is the resolution of actuators. The problems in spot & pit size is covered by new data storage methods-- for examples, AFM(Atomic Force Microscopy), MO(Magneto-optical) system, and NFR(Near-Field Recoding) system etc. But the resolution limit of an actuator was not developed and doesnt follow up the development of spot & pit size. Because of them, we should improve a resolution of an actuator.
Especially, in this paper an actuator is studied and designed for NFR (in using SIL(Solid Immersion Lens) system. It is a dual stage actuator, which consists of a Fine actuator and a Coarse actuator, and should desire 100nm accuracy. Its actuating force generation method is VCM(Voice Coil Motor). The Fine actuator is composed of 4-leaf springs and a bobbin wrapped by coil. The Coarse actuator has Coils and 3-Roller bearings.
Also, The Characteristics of designed actuator for NFR system is estimated by Sine-Swept mode and LDV(Laser Doppler Vibro-meter)
