The Maxwell-Boltzmann equations are solved for a helicon discharge reactor. Utilizing the solution, we also calculate a total reactor impedance and various components of plasma resistance. And inspect dependence of the impedance on operational and geometrical parameters.
A finite ion mass effect which have been ignored in considering the helicon discharge is inspected. Consequently, the ion effect can not be ignored because that it prominently changes TG(Trivelpiece Gould) mode characteristics and also result in great changes of the plasma impedance.
Including the ion effect, a new cavity resonance appears which are absent in electron only case. In this resonance condition, the plasma resistance is inversely proportional to collision frequency and this is a clear evidence of resonant power coupling.
