Film Bulk Acoustic Resonators(FBARs) have lot of potential using in Personal Communication System. In order to perform IMT 2000, 2GHz band pass filters are required. This study is focused on the experimental factors that precede the fabrication of FBAR. Simulation is performed in the solidly mounted FBARs using ZnO & AlN by two models, such as Lakin’s Model and Mason Equivalent Model. The optimum condition is determined on the combination of reflection layers, the number of reflection layers and the area of electrode. The loading effect is considered in using Au electrode.
