서지주요정보
표면 형상측정을 위한 큰 등가파장 회절격자 간섭계 = Diffraction grating interferometer of large equivalent wavelength for surface flatness testing
서명 / 저자 표면 형상측정을 위한 큰 등가파장 회절격자 간섭계 = Diffraction grating interferometer of large equivalent wavelength for surface flatness testing / 황태준.
발행사항 [대전 : 한국과학기술원, 2000].
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소장정보

등록번호

8010910

소장위치/청구기호

학술문화관(문화관) 보존서고

MME 00085

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리뷰정보

초록정보

This thesis is focused on the design of the diffraction grating interferometer of large equivalent wavelength for machined surface flatness testing. Two transmission diffraction gratings are used for illuminating an object with two beams at different angles of incidence. The generated interference pattern has a large equivalent wavelength, depending on the angles of incidence. The suggested design minimizes the unnecessary diffraction rays and the systematic errors by the diffraction gratings. For this purpose, the stray light and error removal parts are designed using a polarized beam splitter, a beam splitter and a prism. It also has advantage of quite large working distance and easy alignment. For improved accuracy, two efforts are applied. First, phase shifting algorithm is adopted. Second, new algorithm is suggested and proved to calibrate the equivalent wavelength error from part defocus. Experimental results of mirror surface and machined surface testing verify the measurement system.

서지기타정보

서지기타정보
청구기호 {MME 00085
형태사항 vi, 34 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Tae-Joon Hwang
지도교수의 한글표기 : 김승우
지도교수의 영문표기 : Seung-Woo Kim
학위논문 학위논문(석사) - 한국과학기술원 : 기계공학전공,
서지주기 참고문헌 수록
주제 회절격자 간섭계
등가파장
표면 형상측정
기준측정평면
등가파장보정
Diffraction grating interferometer
Equivalent wavelength
Surface flatness testing
Reference measurement plane
Equivalent wavelength calibration
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