서지주요정보
SIL(solid immersion lens)을 이용한 근접장 마이크로스코프의 제작및 설계에 관한 연구 = Design and fabrication of near-field microscope using solid immersion lens
서명 / 저자 SIL(solid immersion lens)을 이용한 근접장 마이크로스코프의 제작및 설계에 관한 연구 = Design and fabrication of near-field microscope using solid immersion lens / 윤형길.
저자명 윤형길 ; Yoon, Hyoung-Kil
발행사항 [대전 : 한국과학기술원, 2000].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8010873

소장위치/청구기호

학술문화관(문화관) 보존서고

MME 00048

SMS전송

도서상태

이용가능

대출가능

반납예정일

초록정보

SIL (solid immersion lens) microscope is an advanced microscope as compared with conventional microscope. SIL has a very high refractive index (n=1.8 - n=3.5) and small size. SIL microscope uses the evanescent field and it's coupling effect to the medium at the flat bottom of SIL, so it has a near-field image. SIL plays a important role to enlarge the effective N.A.(secondary-lens). So we can obtain a samll spot at most and it is possible to measure a specimen which has sub-wavelength pattern. We can use also it's principle to optical data storage device which is NFR (near-field recording). Using NFR, we can achieve a high areal density and lage data storage capacity so it will be next-generation technology. In this paper, we designed and made a SIL microscope using SIL (diameter = 1mm, refractive index n=1.83). For similrarity and compactness of applicated system, we used optical pick-up head and used tube-pzt actuator for specimen-scanning. Through the real experiment, we obtained the real scanned image of 700nm, 300nm standard specimens using SIL effect and analyzed the result and error of image and system. According to this paper we can assure the capability of SIL microscope and posibility of the developement of high-density, large-amount data storage device.

서지기타정보

서지기타정보
청구기호 {MME 00048
형태사항 vi, 60 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Hyoung-Kil Yoon
지도교수의 한글표기 : 권대갑
지도교수의 영문표기 : Dae-Gab Gweon
학위논문 학위논문(석사) - 한국과학기술원 : 기계공학전공,
서지주기 참고문헌 : p. 59-60
주제 근접장
마이크로스코프
나노패턴
픽업헤드
SIL(solid immersion lens)
Microscope
Near-field
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