SIL (solid immersion lens) microscope is an advanced microscope as compared with conventional microscope. SIL has a very high refractive index (n=1.8 - n=3.5) and small size. SIL microscope uses the evanescent field and it's coupling effect to the medium at the flat bottom of SIL, so it has a near-field image. SIL plays a important role to enlarge the effective N.A.(secondary-lens). So we can obtain a samll spot at most and it is possible to measure a specimen which has sub-wavelength pattern. We can use also it's principle to optical data storage device which is NFR (near-field recording). Using NFR, we can achieve a high areal density and lage data storage capacity so it will be next-generation technology.
In this paper, we designed and made a SIL microscope using SIL (diameter = 1mm, refractive index n=1.83). For similrarity and compactness of applicated system, we used optical pick-up head and used tube-pzt actuator for specimen-scanning. Through the real experiment, we obtained the real scanned image of 700nm, 300nm standard specimens using SIL effect and analyzed the result and error of image and system. According to this paper we can assure the capability of SIL microscope and posibility of the developement of high-density, large-amount data storage device.
