서지주요정보
위상천이법을 이용한 In-Plane 마이크로 모아레기법 개발에 관한 연구 = A study of In-Plane micro moire technique using phase shifting method
서명 / 저자 위상천이법을 이용한 In-Plane 마이크로 모아레기법 개발에 관한 연구 = A study of In-Plane micro moire technique using phase shifting method / 양세영.
저자명 양세영 ; Yang, Se-Young
발행사항 [대전 : 한국과학기술원, 2000].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8010865

소장위치/청구기호

학술문화관(문화관) 보존서고

MME 00040

휴대폰 전송

도서상태

이용가능

대출가능

반납예정일

초록정보

In this research, phase shifting method is used to modify PEMI(Portable Engineering Moire Interferometer) into micro moire interferometer which can measure displacement field with highly improved sensitivity. Apart from existing micro moire technique, a low cost and less precise translation stage with rough resolution(10㎛ resolution) is adapted for the phase shifter. Moreover, specimen grating instead of reference grating is phase shifted and again the cost is outstandingly reduced. Least square algorithm is applied to minimize the errors induced by lowering the cost. To verify the newly constructed micro moire technique, displacement field of Ultra CSP and solder specimen was measured. For Ultra CSP, microscopic local displacement fields such as ACA layer and underfilled area were obtained with increased sensitivity. For solder specimen, displacement field of a solder ball with 300㎛ pitch was acquired with predominantly elevated sensitivity of 26nm per fringe.

서지기타정보

서지기타정보
청구기호 {MME 00040
형태사항 v, 62 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Se-Young Yang
지도교수의 한글표기 : 이순복
지도교수의 영문표기 : Soon-Bok Lee
학위논문 학위논문(석사) - 한국과학기술원 : 기계공학전공,
서지주기 참고문헌 : p. 31-32
주제 위상천이
마이크로 모아레 간섭계
최소자승법
분해능
Phase shifting
Micro moire interferometer
Least square
Sensitivity
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