서지주요정보
간섭원리를 이용한 이송축의 진직 운동 정확도 측정 = Measurement of moving accuracy of a precision machine axis with laser interferometry
서명 / 저자 간섭원리를 이용한 이송축의 진직 운동 정확도 측정 = Measurement of moving accuracy of a precision machine axis with laser interferometry / 임노빈.
저자명 임노빈 ; Yim, Noh-Bin
발행사항 [대전 : 한국과학기술원, 2000].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8010998

소장위치/청구기호

학술문화관(문화관) 보존서고

DME 00018

휴대폰 전송

도서상태

이용가능

대출가능

반납예정일

리뷰정보

초록정보

 Optical heterodyne interferometry has been widely used to measure linear or angular displacement for industrial applications. Nowadays, considerable need exists for more high-resolution, more high-speed interferometer system as a result of increasing demands for higher dimensional accuracy and productivity.  A new digital phase measuring concept for a heterodyne displacement measuring interferometer is presented for high-speed and high-resolution laser interferometer. A high bandwidth electronic counter with low resolution and a high-resolution phase meter with low bandwidth are used simultaneously. We design the beat frequency shifter and the phase meter with "heterodyne detection scheme" and PSD and low-pass filter circuit.  We test the performance of the designed beat frequency shifter and phase meter compared with general phase meter. And usefulness of that scheme is proved with static and dynamic test of the designed circuit and typical phase meter. Designed target specification is satisfied and the accuracy is improved by proposed scheme.  This paper presents a measuring method of all movement errors i.e. 5 degree of freedom of a translatory precision machine axis. This method is a simultaneous measuring technique in which two plane mirrors are used to generate an interferometric fringe pattern utilizing the optical principles of Twyman-Green interferometry. From the fringe pattern, one translatory and two rotational error components of the machine axis are simultaneously detected by using CCD camera vision and image processing techniques. And new optics are designed for simultaneous measuring of all movement errors. Experimental results demonstrate that a machine axis can be controlled with movement errors less than 50nm in vertical straightness, 0.2arcsec in yaw, and0.1arcsec in pitch.

서지기타정보

서지기타정보
청구기호 {DME 00018
형태사항 vii, 135 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Noh-Bin Yim
지도교수의 한글표기 : 김승우
지도교수의 영문표기 : Seung-Woo Kim
학위논문 학위논문(박사) - 한국과학기술원 : 기계공학전공,
서지주기 참고문헌 : p. 127-135
주제 레이저 간섭계
위치결정정도
운동 정밀도
광위상간섭계
Laser interferometer
Linear accuracy
5-axis Tilt Error
Twyman-Green interferometry
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