서지주요정보
마이크로 머신 기술로 제작된 열차단 구조를 이용한 가청 주파수 대역 필터의 설계 = Audio frequency filter design using micromachined thermally-isolated diaphragm structures
서명 / 저자 마이크로 머신 기술로 제작된 열차단 구조를 이용한 가청 주파수 대역 필터의 설계 = Audio frequency filter design using micromachined thermally-isolated diaphragm structures / 변희진.
저자명 변희진 ; Byun, Hee-Jin
발행사항 [대전 : 한국과학기술원, 2000].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8010472

소장위치/청구기호

학술문화관(문화관) 보존서고

MEE 00043

SMS전송

도서상태

이용가능

대출가능

반납예정일

초록정보

This paper reports audio frequency electrothermal filter design using micromachined thermally-isolated diaphragm structures. Generally, large capacitance is needed for low frequency filters. In this paper, micromachined electrothermal structures have been used to obtain equivalent large capacitance suitable for audio frequency range filter design. Low frequency filter operation has been achieved by a thermal time constant ($\cong 10msec$) in the electrothermal structures. Design parameters with respect to filter characteristics have been analyzed and design guidelines have been identified. Electrothermal filters using electrothermal structures with driving circuitry are realized. Measured responses show that characteristic frequency can be electrically tuned ranging from 30Hz to 300Hz. Canceling scheme of the thermal conductance, is proposed and is adapted to improve electrothermal filter characteristics. According to the proposed design guidelines, electrothermal filters ranging from 25Hz to 2.5kHz have been designed and simulated.

서지기타정보

서지기타정보
청구기호 {MEE 00043
형태사항 ii, 49 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Hee-Jin Byun
지도교수의 한글표기 : 윤의식
지도교수의 영문표기 : Eui-Sik Yoon
학위논문 학위논문(석사) - 한국과학기술원 : 전기및전자공학전공,
서지주기 참고문헌 : p. 48-49
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