A new model for calculation of inductance of three dimensional micro solenoid inductor is proposed. Three dimensional micro solenoid inductor is fabricated by using Sacrificial Metallic Mold(SMM). The Characteristics of micro solenoid inductor is measured at High Frequency(1-10GHz). Fabricated micro solenoid inductor has high Q-factor and inductance.
Proposed model considers Expanded Grover Model and a variation of current distribution of micro solenoid inductor at high frequency. This model can estimate the inductance of micro solenoid inductor within 10% of the real value.
