서지주요정보
비냉각 적외선 볼로미터를 위한 소자구조와 물질에 대한 연구 = A study on structures and materials for a uncooled infrared bolometer
서명 / 저자 비냉각 적외선 볼로미터를 위한 소자구조와 물질에 대한 연구 = A study on structures and materials for a uncooled infrared bolometer / 이형규.
저자명 이형규 ; Lee, Hyung-Kew
발행사항 [대전 : 한국과학기술원, 1999].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8009778

소장위치/청구기호

학술문화관(문화관) 보존서고

MEE 99094

SMS전송

도서상태

이용가능

대출가능

반납예정일

초록정보

There is a growing interest in infrared image for a wide range of applications from military and commercial night vision to the heat sensing for a fire alarm or for medical applications. Detection mechanism of infrared can be classified into two groups: photon detection and thermal detection. Photon detectors are too expensive for general commercial applications because of the requirement of cryogenic cooling. Three types of thermal detectors have been reported in recent years: resistive bolometers, thermopile detectors, and pyroelectric detectors. In this work we have chosen a bolometer approach because its responsivity is much higher than that of thermopile detectors and it is easy to fabricate compared to pyroelectric detectors. Bolometers are thermistor-based sensors that measure temperature change in a thermally-isolated membrane heated by infrared radiation absorbed on the surface. There are two major design issues on bolometers. One is a structure issue and the other is a material issue. In order to obtain high detectivity, structures must have a good thermal isolation and a high fill-factor, and materials must have a high TCR and low noise. In this work we proposed a new structure with a high fill-factor. By using micromachined multi-level structure we have achieved high fill-factor over 92% in a 50㎛×50㎛ pixel with a detectivity of $5×10^{8}cm\sqrt{Hz}/W$. As a new material, we have studied microcrystalline SiC thin films and we have achieved a TCR of 3.27%. From a sample with the TCR of 0.8% we have estimated the detectivity improved to be $1.5×10^{9}cm\sqrt{Hz}/W$.

서지기타정보

서지기타정보
청구기호 {MEE 99094
형태사항 iii, 69 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Hyung-Kew Lee
지도교수의 한글표기 : 윤의식
지도교수의 영문표기 : Eui-Sik Yoon
학위논문 학위논문(석사) - 한국과학기술원 : 전기및전자공학과,
서지주기 참고문헌 : p. 67-69
주제 적외선
센서
볼로미터
IR
Bolometer
Infrared
Detector
Sensor
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