서지주요정보
광 위상 간섭계를 위한 자가 보정법에 대한 연구 = Self-calibration for phase measuring interferometry
서명 / 저자 광 위상 간섭계를 위한 자가 보정법에 대한 연구 = Self-calibration for phase measuring interferometry / 이혁교.
저자명 이혁교 ; Lee, Heok-Kyo
발행사항 [대전 : 한국과학기술원, 1999].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8009546

소장위치/청구기호

학술문화관(문화관) 보존서고

MME 99063

SMS전송

도서상태

이용가능

대출가능

반납예정일

초록정보

Wavefront phase-measuring interferometers yield inevitable systematic measurement errors caused by the fabrication imperfection of constituting optical components and also by the alignment inaccuracy of assembly work. However, not like random errors, the systematic measurement errors holds some invariant rules upon the rotation of test workpieces around the optical axis, so that accurate self-calibration becomes possible without relying upon costly precision reference masters. In this dissertation a new self-calibration algorithm of multiple-step rotation is proposed with an aim to improving calibration accuracy by removing practical calibration errors induced by the inaccuracy of workpiece rotation. It is named the arbitrary-step rotation (AR) algorithm and may be regarded as an extended version of self-calibration. The rotation angles are taken as additional unknowns together with wavefront phases in the AR algorithm, and they are determined simultaneously through least squares technique. This new algorithm allows not only exact extraction of asymmetric systematic errors but also precise calibration of non-orthogonality of wavefronts in case of lateral shearing interferometers. Experimental results are discussed together with some other attempts to eliminate symmetric wavefront errors.

서지기타정보

서지기타정보
청구기호 {MME 99063
형태사항 [vi], 89 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Heok-Kyo Lee
지도교수의 한글표기 : 김승우
지도교수의 영문표기 : Seung-Woo Kim
학위논문 학위논문(석사) - 한국과학기술원 : 기계공학과,
서지주기 참고문헌 : p. 49-51
주제 자가 보정법
회전 오차
임의 회전파면 측정
회전대칭
해석축
Self-calibration
Rotation error
AR-step algorithm
Zernike polynomial
Rotationally symmetry
Analytic axis
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