서지주요정보
NSOM의 shear force 특성 분석 및 3차원 표면 형상 측정에 관한 연구 = Shear force characteristics of NSOM and 3-dimensional topology measurement
서명 / 저자 NSOM의 shear force 특성 분석 및 3차원 표면 형상 측정에 관한 연구 = Shear force characteristics of NSOM and 3-dimensional topology measurement / 이준희.
저자명 이준희 ; Lee, Jun-Hee
발행사항 [대전 : 한국과학기술원, 1999].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8009544

소장위치/청구기호

학술문화관(문화관) 보존서고

MME 99061

SMS전송

도서상태

이용가능

대출가능

반납예정일

초록정보

NSOM(Near field scanning optical microscopy) is performed by scanning a subwavelength optical probe in the vicinity of a sample surface. The optical probes have an aperture radius of the order of 50 to 200nm. The probe-sample separation should be less than the aperture radius to obtain optical information with spatial resolution of the order of the aperture radius. For this reason, probe-sample distance regulation plays a central role in NSOMs. The most popular technique to regulate the probe-sample distance is to vibrate the probe parallel to the sample surface and sense a decrease in the vibration amplitude of the probe. In this paper, the probe is modeled as a 2`nd order mass-spring-damper system driven by a harmonic force. The primary cause of the decrease in vibration amplitude is due to an increase in damping force - shear force - between the surface and the probe. Using the model, damping constant and resonance frequency of the probe can be calculated as a function of probe-sample distance. The characteristic of shear force will be shown more detail. Using the shear force characteristic and mechanical resonance of piezoelectric tuning fork, we can control the position of the optical probe about 0 to 50nm above the sample. The feedback signal to regulate the probe-sample distance can be used independently for surface topography imaging. The result of the shear force image will be shown.

서지기타정보

서지기타정보
청구기호 {MME 99061
형태사항 v, 53 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Jun-Hee Lee
지도교수의 한글표기 : 권대갑
지도교수의 영문표기 : Dae-Gab Gweon
학위논문 학위논문(석사) - 한국과학기술원 : 기계공학과,
서지주기 참고문헌 : p. 27-28
주제 근접장 광학현미경
전단력
압전소자튜닝포크
탐침-시편 거리조절
표면형상
NSOM
Shear force
Piezoelectric tuning fork
Probe-sample distance regulation
Topography imaging
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