서지주요정보
위상 변환 격자를 이용한 선형 엔코더의 오차 보상법 개발 = Development of a new error compensation method in linear encoder using phase shifted grating
서명 / 저자 위상 변환 격자를 이용한 선형 엔코더의 오차 보상법 개발 = Development of a new error compensation method in linear encoder using phase shifted grating / 송주호.
저자명 송주호 ; Song, Ju-Ho
발행사항 [대전 : 한국과학기술원, 1999].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8009516

소장위치/청구기호

학술문화관(문화관) 보존서고

MME 99033

SMS전송

도서상태

이용가능

대출가능

반납예정일

초록정보

The performance of the industrial machines mainly depends on accuracy of their displacement measuring devices. Among the various measuring devices, optical encoders are widely used because of high resolution/cost ratio and small size. Nowadays, the encoders are generally used in the machines which require micron order measurements, for example CNC machines, industrial robots, transfer mechanisms, stages, and so on. The optical encoder using moire fringes is easy to manufacture compared with other optical encoders, but is very sensitive to the change of fringe space which are caused by tilt or misalignment. The change of fringe space results in quadrature phase shift error of detecting signals and have relatively large influences on the measured values. When two scales which have 200㎛ pitches superposed with 2˚ and the angle of two scales had a tilt of just 0.5 degree, the displacement error reached 16㎛ with its maximum. And it prevents us from improving the resolution of the encoders. In this paper, newly designed grating, named phase shifted grating, is described to compensate quadrature phase shift error. In the conventional encoders the detectors are aligned perpendicular to the direction of moire fringes. From the alignment we can receive two 90 degree phase shifted sinusoidal signals. Therefore, the phase of signals is sensitive to the changes of fringe spacing. But by adapting phase-shifted grating instead of previous index scale, we can get 90˚ phase shifted fringes parallel to the direction of moire fringes. Therefore, the phase of signals is insensitive to the changes of fringe spacing in proposed system. The displacement error of linear encoder using phase shifted grating was experimentally determined to be 3㎛ for tilt of index scale of 0.5˚.

서지기타정보

서지기타정보
청구기호 {MME 99033
형태사항 iv, 48 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Ju-Ho Song
지도교수의 한글표기 : 김수현
지도교수의 영문표기 : Soo-Hyun Kim
학위논문 학위논문(석사) - 한국과학기술원 : 기계공학과,
서지주기 참고문헌 : p. 47-48
주제 광학 엔코더
모아레 무늬
위상 변환 격자
변위 측정
Optical encoder
Moire fringes
Phase shifted grating
Displacement measurement
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