서지주요정보
다결정 실리콘의 Gauge factor 측정을 위한 외팔보 구조의 제작 = Fabrication of cantilever structures for polysilicon Gauge factor measurements
서명 / 저자 다결정 실리콘의 Gauge factor 측정을 위한 외팔보 구조의 제작 = Fabrication of cantilever structures for polysilicon Gauge factor measurements / 신진현.
저자명 신진현 ; Shin, Jin-Hyun
발행사항 [대전 : 한국과학기술원, 1998].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8009141

소장위치/청구기호

학술문화관(문화관) 보존서고

MEE 98109

SMS전송

도서상태

이용가능

대출가능

반납예정일

초록정보

Stress-compensated cantilevers have been fabricated to measure polysilicon gauge factors. This structure consists of heavily boron-doped silicon, thermal $SiO_2$, LPCVD Silicon Nitride, polysilicon and LTO $SiO_2$. The basic idea of this structure is that external force exerts on freestanding end of the cantilever and induces vertical deflection in the cantilever structure. This deforms polysilicon structures and leads to a resistance change in the polysilicon resistors located at the rim of cantilevers. Polysilicon gauge factor is calculated by measuring the resistance change of polysilicon and the vertical deflection of cantilevers. The analysis of cantilever structure is based on small deflection theory. Stress-compensated cantilever structures have been achieved by multilayer deposition of LPCVD silicon nitride, thermal silicon oxide and LTO silicon oxide films. The stress of each film is +600MPa, -310.7MPa and -549MPa, respectively (+ means tensile stress and - means compressive stress). Finally, the cantilevers are formed by using selective anisotropic silicon etch with P+ silicon as an etch stop. The deflection of cantilevers is detected by using optical microscope with 2um resolution. The resistance of polysilicon is measured by digital multimeter. A gauge factor of -8.9 was measured for polysilicon resistors implanted by phosphorus with a dose of $3×10^{15} (cm^{-2})$.

서지기타정보

서지기타정보
청구기호 {MEE 98109
형태사항 iii, 57 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Jin-Hyun Shin
지도교수의 한글표기 : 윤의식
지도교수의 영문표기 : Eui-Sik Yoon
학위논문 학위논문(석사) - 한국과학기술원 : 전기및전자공학과,
서지주기 참고문헌 : p. 56-57
QR CODE qr code