서지주요정보
광학설계의 안정성 평가에 관한 Tolerance 이론 = Tolerance theory for stability assessment of optical design
서명 / 저자 광학설계의 안정성 평가에 관한 Tolerance 이론 = Tolerance theory for stability assessment of optical design / 박찬영.
저자명 박찬영 ; Park, Chan-Young
발행사항 [대전 : 한국과학기술원, 1998].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8008455

소장위치/청구기호

학술문화관(문화관) 보존서고

MPH 98013

SMS전송

도서상태

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반납예정일

초록정보

In designing and subsequently producing a optical system, it is necessary to get tolerance analysis for a stability assesment of optical system quality. A new tolerance theory, which defines tolerable degree of manufacturing error, is developed on the basis of optical aberration fuction. Small tolerance results in large change of aberration and optical quality, so that small tolerance indicates the design parameter which requires particular attentions in fabrication of the optical system. Tolerance theory is applied to the four-mirror optical system for sub-micron lithography, already developed in this laboratory for a prolonged time. Seidel third order aberrations are expressed by Gaussian brackets, which have 8 design parameters. Tolerances of each of the Seidel third order aberration are derived under the condition of the design parameters having the error in ±5%. Curvatures of first reflective plane and fourth reflective plane have small tolerance. Also changes of aberrations are simulated under the condition of the design parameters having the error in ±5%. Petzval field curvature has the largest change in the Seidel third order aberrations. The tolerance theory developed in this work can be incorporated during computer optical design work.

서지기타정보

서지기타정보
청구기호 {MPH 98013
형태사항 ii, 89 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Chan-Young Park
지도교수의 한글표기 : 이해웅
지도교수의 영문표기 : Hai-Woong Lee
학위논문 학위논문(석사) - 한국과학기술원 : 물리학과,
서지주기 참고문헌 : p. 87-89
주제 광학설계
수차
평가
Optical design
Tolerance
Aberration
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