서지주요정보
광/엑스선 복합간섭 고분해능 레이저 간섭계의 개발 = A high resolution laser interferometer for combined optical x-ray interferometry
서명 / 저자 광/엑스선 복합간섭 고분해능 레이저 간섭계의 개발 = A high resolution laser interferometer for combined optical x-ray interferometry / 김민석.
발행사항 [대전 : 한국과학기술원, 1998].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8008565

소장위치/청구기호

학술문화관(문화관) 보존서고

MME 98013

휴대폰 전송

도서상태

이용가능

대출가능

반납예정일

리뷰정보

초록정보

The combined optical and x-ray interferometer is an instrument that provides a means for transducer calibrations in terms of the standard of length with subnanometric resolution. In combined optical and x-ray interferometry, the optical interferometer is used as the main ruler and the x-ray interferometer as a linear interpolator for subnanometric accuracy. To achieve subnanometric accuracy in combined interferometry, there is a need for a optical interferometer with subnanometric resolution and accuracy at reference points that are considered as null points for interpolation. To this end, a laser heterodyne interferometer was developed. This device is composed of four parts; a laser head, compact optics, phase demodulator electronics including phase sensitive detectors, and a computer for displacement calculation. The optical components stick together and the optics are designed so that the optical paths of two interference beams are equal for high stability. The simulation using a phase lock assembly showed that the phase demodulator resolves optical phase difference up to 0.01˚ corresponding to 0.01 nm displacement and finds reference points with 0.03 nm accuracy(standard deviation). Experimental results are shown of noises, optics stability, and PZT displacement. Investigation about noises source, the error budget and possible improvements are discussed.

서지기타정보

서지기타정보
청구기호 {MME 98013
형태사항 viii, 68 p. : 삽화 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Min-Seok Kim
지도교수의 한글표기 : 김승우
지도교수의 영문표기 : Seung-Woo Kim
학위논문 학위논문(석사) - 한국과학기술원 : 기계공학과,
서지주기 참고문헌 : p. 31-33
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