서지주요정보
AFM scanner용 초정밀 XYZ 스테이지의 설계, 특성분석 및 제어에 관한 연구 = A precision XYZ-stage for AFM scanner design, analysis and control
서명 / 저자 AFM scanner용 초정밀 XYZ 스테이지의 설계, 특성분석 및 제어에 관한 연구 = A precision XYZ-stage for AFM scanner design, analysis and control / 심종엽.
저자명 심종엽 ; Shim, Jong-Youp
발행사항 [대전 : 한국과학기술원, 1998].
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소장정보

등록번호

8008595

소장위치/청구기호

학술문화관(문화관) 보존서고

MME 98043

SMS전송

도서상태

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대출가능

반납예정일

초록정보

There are recently increasing needs for precision XYZ-stage in the fields of nanotechnology, specially in AFMs(Atomic Force Microscope) and STMs(Scanning Tunneling Microscope). Force measurements are made in the AFM by monitoring the deflection of a flexible element (usually a cantilever) in response to the interaction force between the probe tip and the sample and controlling the force measured constant topography can be obtained. The power of the STM is based on the strong distance dependence of the tunneling current in the vacuum chamber and the current is a feedback for the tip to trace the surface topography. Therefore, it is required for XYZ-stage to position samples with nanometer resolution, without any crosscouples and any parasitic motion and with fast response. Nanometer resolution is essential to investigate topography with reasonable shape. No crosscouples and parasitic motion is essential to investigate topography without any shape distortion. Fast response is essential to investigate topography without any undesirable interaction between the probe tip and the sample surface ; sample scratch. To satisfy these requirements, this paper presents a novel XYZ-stage concept, it is actuated by PZT and has a monolithic flexible body that is made symmetric as possible to guide the motion of the moving body linearly. PZT actuators have a very fast response and infinite resolution. Due to the monolithic structure, this XYZ-stage has no crosscouples and by symmetry it has no parasitic motion. Analytical modeling of this XYZ-stage and its verification by FEM modeling are performed and optimal design that is to maximize 1st natural frequencies of the stage is also presented and with that design values stage is manufactured. In order to overcome undesirable open loop responses in the direction of XY-axes, PID feedback controller is used and analytical model is used to simulate closed loop response and tune the PID gains. Finally, resolution of 7 nanometers and satisfactory transient responses are obtained in the direction of XY-axes and sample scanning topography is also presented.

서지기타정보

서지기타정보
청구기호 {MME 98043
형태사항 vii, 63 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Jong-Youp Shim
지도교수의 한글표기 : 권대갑
지도교수의 영문표기 : Dae-Gab Gweon
학위논문 학위논문(석사) - 한국과학기술원 : 기계공학과,
서지주기 참고문헌 : p. 33-34
주제 초정밀 3축 스테이지
원자현미경
압전소자
최적설계
PID제어
Precision XYZ-stage
AFM
PZT
Optimal design
PID feedback controller
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