This dissertation deals with ultraprecision turning machine diagnosis by surface profile analysis. In general, ultraprecision turning machine have error components, such as spindle rotational error, guideway straightness error, chatter of tool, etc. It is possible to gain knowledge about the contribution of each of these components on the finish of the machined surface through the analysis of the contribution of frequency spectrum of the surface profile. In general, error components be represent as relative vibration between tool and workpiece and this relative vibration cause waveness in surface profile of workpiece. FFT analysis of surface profile detect relative vibration between tool and workpiece and error components is known by relative vibration detected. Machining accuracy of ultraprecision turning machine be nanometer range. And spatial period of waveness that exist in surface machined be represent widely according as cutting condition and relative vibration. Thus wide measuring range, high lateral resolution and vertical resolution of nanometer range is necessary to analysis surface profile. Phase shift interferometer have high lateral resolution and vertical resolution of nanometer range. But measuring range be narrow. Thus stitching algorithm that stitch each measuring profile in each different position is necessary.