Hydrodynamic damping in a resonant micro accelerometer is investigated on the basis of Stokes approximation with special attention to the edge effect. The hydrodynamic damping is modeled as two dimensional slow viscous flow due to the squeezing of two parallel plates whose lengths are large compared with the gap distance.
The problem is solved using the method of matched asymptotic theory with the decomposition of the region into three parts. One of the decomposed problems is reduced to a mixed boundary value problem and others are solved by coordinate transformation and numerical analysis. From the obtained solutions, pressure and force acting on the plate is calculated.
