서지주요정보
초정밀 서어보형 가속도계의 개발에 관한 연구 = A study on development of precision servo accelerometer
서명 / 저자 초정밀 서어보형 가속도계의 개발에 관한 연구 = A study on development of precision servo accelerometer / 제우성.
발행사항 [대전 : 한국과학기술원, 1997].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8007174

소장위치/청구기호

학술문화관(문화관) 보존서고

DME 97027

휴대폰 전송

도서상태

이용가능

대출가능

반납예정일

리뷰정보

초록정보

This thesis is focused on the development of a precision servo accelerometer. Acceleration is a physical quantity, which gains increasing interests in many systems with regard to motion measurement, control, automation or other measurement applications. For motion measurement, it is essential to measure low-frequency acceleration with high accuracy. Servo accelerometers with servo feedback loop have been most commonly used for this purpose. The servo accelerometers can be basically divided into two categories by manufacturing process and its size: (a) micromachining servo accelerometers and (b) electromechanical servo accelerometers. Micromachining servo accelerometers have generated great interests in recent years. The use of surface micromachining and/or bulk micromachining offers the possibility of producing smaller, lighter and potentially cheaper devices by a batch process. However these new devices do not yet have the sensitivity to be used in precision motion measurement applications such as inertial navigation and guidance instruments. The inertial navigation system (INS) applications need accelerometers of which performance is roughly characterised by a maximum working range of ±20 g (where g is the acceleration due to gravity) with a sensitivity threshold (DC resolution) of $10^{-4}g$. Since precision acceleration is measured, the stability of performance of accelerometers is also important. That is to say, these applications require more stable and more accurate accelerometers than currently developed micromachining servo accelerometers by several orders of magnitude. Therefore electromechanical servo accelerometers which have complicated structures and larger size than micromachining servo accelerometers are still widely used in INS applications and have been designed and developed by several researchers. This paper is concerned in a design of an electromechanical servo accelerometer for INS applications. Special design considerations are made to guarantee low sensitivity threshold and high thermal stability. In order to guarantee low sensitivity threshold while maintaining robustness against shock, the push-pull type long flexures are used in this paper. To improve thermal stability, this paper suggests electromagnets as a source of magnetic field and develops the silicon case together with the temperature compensator. The silicon pendulum assembly and the modified inductance type pick-up is also developed to reduce assembling procedure. After assembling the accelerometer, static tests are carried out. Static test show a sensitivity threshold of $4.6 \times 10^{-5}g$ and a maximum measurement range of ±24g. The push-pull type long flexures reduces spring constant considerably.

서지기타정보

서지기타정보
청구기호 {DME 97027
형태사항 ix, 125 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Woo-Seong Che
지도교수의 한글표기 : 오준호
지도교수의 영문표기 : Jun-Ho Oh
수록잡지명 : "Development of force-balance accelerometer with high accuracy for precision motion measurement". Measurement, Science and Technology. IOP Publishing Ltd, vol. 7, no. 7, pp. 1001-1011
학위논문 학위논문(박사) - 한국과학기술원 : 기계공학과,
서지주기 참고문헌 : p. 119-125
주제 서어보형 가속도계
가속도계의 설계
가속도계의 제작
가속도계의 보정 시험
서보 구동기
제어기
모델링
Servo accelerometer
Design of accelerometer
Fabrication of accelerometer
Calibration of accelerometer
Servo acuator
Controller
Modelling
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