A novel driving and sensing circuit of silicon angular rate sensor is designed. This circuitry has self resonating comb driving part and continuous-time capacitor amplifier. Since the electrical model of micro-gyro is similar to crystal oscillator, the comb driving parts are composed of inverting op_amp and RC delay cells to satisfy oscillation phase delay. The capacitance change sensing parts use powerful input stage. This input stage has band-pass characteristic and weak inversion feedback with very low bias current.
