서지주요정보
표면 탄성파 필터의 제작 및 특성연구 = Fabrication and characterization of surface acoustic wave filter
서명 / 저자 표면 탄성파 필터의 제작 및 특성연구 = Fabrication and characterization of surface acoustic wave filter / 서재광.
발행사항 [대전 : 한국과학기술원, 1997].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8007291

소장위치/청구기호

학술문화관(문화관) 보존서고

MPH 97001

휴대폰 전송

도서상태

이용가능

대출가능

반납예정일

리뷰정보

초록정보

SAW filters were fabricated on a 128 degree rotated Y-cut X-propagation $LiNbO_3$, Y-cut Z-propagation $LiNbO_3$, and ZnO film. Inter-digital transducer (IDT) patterns were designed by a simple delta function model. The characteristics of the filter were investigated by measuring the frequency response of input admittance and transfer function, and by comparing with Mason cross-field model. IDT is placed on the substrate by image reversal lithography and lift-off method. The center frequency is SAW velocity over IDT pattern period. In 128YX $LiNbO_3$, 134 MHz and 64.8 MHz IDT were fabricated. Insertion loss of filter is -21 dB and out of band rejection is about 15 dB. The filter performance such as out of band rejection was degraded by bulk wave interference. It can be decreased by acoustic wave absorber. As an absorber, wax on the polished surface and silver epoxy on the bottom surface were adapted. To improve the filter response, it is important to reduce bulk wave and electrostatic effect.

서지기타정보

서지기타정보
청구기호 {MPH 97001
형태사항 [ii], 68 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Jae-Kwang Seo
지도교수의 한글표기 : 김수용
지도교수의 영문표기 : Soo-Yong Kim
학위논문 학위논문(석사) - 한국과학기술원 : 물리학과,
서지주기 참고문헌 : p. 66-68
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