서지주요정보
DC magnetron sputtering으로 증착한 Cr 산화물 박막의 두께 균일도 및 광학적인 특성 분석 = Analysis on thickness uniformity and optical properties of chromium oxide thin films deposited by DC magnetron sputtering
서명 / 저자 DC magnetron sputtering으로 증착한 Cr 산화물 박막의 두께 균일도 및 광학적인 특성 분석 = Analysis on thickness uniformity and optical properties of chromium oxide thin films deposited by DC magnetron sputtering / 홍승범.
저자명 홍승범 ; Hong, Seung-Bum
발행사항 [대전 : 한국과학기술원, 1996].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8006541

소장위치/청구기호

학술문화관(문화관) 보존서고

MMS 96049

SMS전송

도서상태

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대출가능

반납예정일

초록정보

The thickness profile of the film deposited by planar circular type magnetron is simulated considering the relationship between magnetic field profile and target erosion rate. The model is confirmed by the measurement of the film thickness profile of the Cr film deposited in this study. It is found that the model is applicable to magnetron sputtering process at low gas pressure. Film cleanness is found to be enhanced by using mesh. This phenomenon might be attributed to the fact that the flux of Cr is reduced by the mesh to decrease the probability of homogeneous reaction of chromium oxide particles. Varying deposition parameters such as Ar:$O_2$ flow rate ratio, substrate temperature induces change in physical and optical properties of the films. Ar:$O_2$ flow rate ratio variation mainly induces change in the film composition and deposition rate with no significant change in optical energy gap and Urbach energy except in the unstable flow rate range. Substrate temperature variation mainly induces change in crystal structure, optical energy gap and Urbach energy with no significant change in composition and deposition rate.

서지기타정보

서지기타정보
청구기호 {MMS 96049
형태사항 iv, 71 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Seung-Bum Hong
지도교수의 한글표기 : 노광수
지도교수의 영문표기 : Kwang-Soo No
학위논문 학위논문(석사) - 한국과학기술원 : 재료공학과,
서지주기 참고문헌 : p. 70-71
주제 크롬
산화물
균일도
스퍼터링
마그네트론
광학적인 성질
위상변이 마스크
메쉬
흡수계수
투광성
Cr
Chromium oxide
Uniformity
Sputtering
Magnetron
Optical properties
Band gap
Phase shifting mask
Mesh
Absorbance
Transmittance
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