서지주요정보
D.C.Magnetron reactive sputtering법으로 증착한 $PbTiO_3$ 박막의 c축 배향성에 미치는 고유웅력의 영향 = Intrinsic stress dependence of c-axis orientation of $PbTiO_3$ thin films by D.C. magnetron reactive sputtering
서명 / 저자 D.C.Magnetron reactive sputtering법으로 증착한 $PbTiO_3$ 박막의 c축 배향성에 미치는 고유웅력의 영향 = Intrinsic stress dependence of c-axis orientation of $PbTiO_3$ thin films by D.C. magnetron reactive sputtering / 이승현.
저자명 이승현 ; Yi, Seung-Hyun
발행사항 [대전 : 한국과학기술원, 1996].
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소장정보

등록번호

8006526

소장위치/청구기호

학술문화관(문화관) 보존서고

MMS 96034

SMS전송

도서상태

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초록정보

$PbTiO_3$ thin films were deposited onto MgO(100) single crystal substrate by reactive D.C. magnetron sputtering of Pb metal and Ti metal in oxygen and argon gas mixture. Residual stress states and c-axis orientation ratios were studied by X-ray diffraction methods. Standard sample which did not have intrinsic stress was made by annealing method. Standard sample of $PbTiO_3$ thin films made by 700℃ 8hour annealing condition had c-axis orientation of 40 percents and c/a ratio of 1.02. Compressive stresses by intrinsic stress increased as working pressure decreased, input power increased and oxygen concentration in gas mixture increased. As the compressive stress in thin films increased, the c-axis orientation ratio increased from 60 percent to 95 percent. When strong compressive stresses existed in $PbTiO_3$ thin films, the author thought that the a-axis oriented lattice structures converted to the c-axis oriented lattice structures for consumption of compressive stresses. As c/a ratios decreased by adding a La in the same sputtering condition, c-axis orientation ratios of $(Pb,La)TiO_3$ decreased from 95percent to 0 percent(cubic structure). It was thought that c-axis orientation ratios decreased for small c/a ratio had little consumption effect of compressive stresses.

서지기타정보

서지기타정보
청구기호 {MMS 96034
형태사항 88 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Seung-Hyun Yi
지도교수의 한글표기 : 최시경
지도교수의 영문표기 : Si-Kyung Choi
학위논문 학위논문(석사) - 한국과학기술원 : 재료공학과,
서지주기 참고문헌 : p. 86-88
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