서지주요정보
자기 부상을 이용한 웨이퍼 반송 시스템에 관한 연구 = A study on wafer transport system based on magnetic levitation
서명 / 저자 자기 부상을 이용한 웨이퍼 반송 시스템에 관한 연구 = A study on wafer transport system based on magnetic levitation / 안길영.
저자명 안길영 ; Ahn, Kil-Young
발행사항 [대전 : 한국과학기술원, 1996].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8006099

소장위치/청구기호

학술문화관(문화관) 보존서고

MME 96048

휴대폰 전송

도서상태

이용가능

대출가능

반납예정일

초록정보

A magnetic levitation is suitable for moving materials in such a clean environment which must be kept free from even microscopic dust motes, for example, in a super clean room in semiconductor manufacturing plants or biochemical plants, because friction can be disappeared or reduced. In addition to this, another advantage of levitation is that the manipulator can operate as a rigid body rather than using jointed parts. In this work, the magnetic levitation is applied to transport a single wafer between semiconductor fabrication process modules in clean rooms because it can eliminate particles and oil contamination that normally exist in conventional transport systems due to contact motions of mechanical component. The transport system consists of a wafer carrier, two levitation tracks, two stabilization tracks, and propelling system. Levitation is achieved by using antagonistic forces produced between electromagnet tracks and permanent magnets. Stabilization is achieved by using a simple feedback control. The continuous propelling force is obtained by sending specific current patterns to the propulsion coils. The dynamic model of transport system is presented and it is verified by experiment. The system performance is experimentally investigated. The magnetically levitated wafer transport system is propelled with a reasonable speed.

서지기타정보

서지기타정보
청구기호 {MME 96048
형태사항 v, 41 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Kil-Young Ahn
지도교수의 한글표기 : 김수현
지도교수의 영문표기 : Soo-Hyun Kim
학위논문 학위논문(석사) - 한국과학기술원 : 기계공학과,
서지주기 참고문헌 수록
주제 자기 부상
영구 자석
전자석
상반 구조
Magnetic levitation
Permanent magnet
Electromagnet
Antagonistic structure
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