서지주요정보
RF Magnetron sputtering으로 제조된 SrS : Ce 박막형 electroluminescence 형광체에 관한 연구 = A study on the SrS : Ce thin film electroluminescence phosphor prepared by RF magnetron sputtering
서명 / 저자 RF Magnetron sputtering으로 제조된 SrS : Ce 박막형 electroluminescence 형광체에 관한 연구 = A study on the SrS : Ce thin film electroluminescence phosphor prepared by RF magnetron sputtering / 김옥희.
발행사항 [대전 : 한국과학기술원, 1996].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8006502

소장위치/청구기호

학술문화관(문화관) 보존서고

MMS 96010

휴대폰 전송

도서상태

이용가능

대출가능

반납예정일

리뷰정보

초록정보

The blue-green emitting thin film electroluminescence SrS:Ce phosphor film was prepared by RF magnetron sputtering. The film was deposited on a-$Si_xN_y$/ITO/Glass in a mixed gas of 60% Ar and 40% He, at 200W, with 1at% Ce doped SrS target, taking the pressure and the temperature as variables of deposition. The crystallinity of the deposited film was investigated by measuring FWHM in XRD pattern, and the microstructure and the composition were analyzed by SEM, WDS, AES and RBS. The SrS film deposited at 300℃ and 5mTorr shows the strong (200) preferred orientation. As the deposition temperature increased from RT to 450℃ the deposition rate, FWHM, and the lattice parameter decreased. The deposition rate shows the maximum at 5mTorr and FWHM increased when the deposition pressure varies from 0.5 to 10mTorr at 450℃. The composition of the film was $SrS_0.84$ showing the S deficiency and 10at% oxygen was involved. The TFEL device with the structure of Al/SiN/SrS:Ce/SiN/ITO/Glass was fabricated for luminescence test, but the test was failed owing to the low breakdown voltage of silicon nitride film used as the insulator layer.

서지기타정보

서지기타정보
청구기호 {MMS 96010
형태사항 ii, 73 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Ok-Hee Kim
지도교수의 한글표기 : 박종욱
지도교수의 영문표기 : Chong-Ook Park
학위논문 학위논문(석사) - 한국과학기술원 : 재료공학과,
서지주기 참고문헌 : p. 70-73
주제 박막형 Electroluminescence
형광체
RF Magnetron 스퍼터링
결정성
미세구조
Thin film electoluminescence
Phosphor
RF Magnetron Sputtering
Crystallininity
Microstructure
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