서지주요정보
헬리콘 플라즈마의 전기적 특성 = Electrical characteristics of helicon plasma
서명 / 저자 헬리콘 플라즈마의 전기적 특성 = Electrical characteristics of helicon plasma / 윤석민.
저자명 윤석민 ; Yun, Seok-Min
발행사항 [대전 : 한국과학기술원, 1996].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8006685

소장위치/청구기호

학술문화관(문화관) 보존서고

MPH 96021

SMS전송

도서상태

이용가능

대출가능

반납예정일

초록정보

The external electrical characteristics of Helicon plasma were measured over a wide range of RF power and magnetic field. External parameters, such as antenna voltage, current, phase shift, and internal parameter, electron density were measured. The equivalent discharge resistance and reactance, and the power transfer efficiency were calculated through these measurements. There are a helicon mode which produces high density plasma by helicon wave and a low-mode which produces low density plasma by capacitive electric field. In case of the helicon mode, voltage and current were lower than those of the low-mode. The phase difference between voltage and current decreases suddenly at the transition point from the low-mode to the helicon mode. Equivalent resistance and power efficiency increase and reactance decreases suddenly at the transition point.

서지기타정보

서지기타정보
청구기호 {MPH 96021
형태사항 ii, 59 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Seok-Min Yun
지도교수의 한글표기 : 장홍영
지도교수의 영문표기 : Hong-Young Chang
학위논문 학위논문(석사) - 한국과학기술원 : 물리학과,
서지주기 참고문헌 : p. 37-39
주제 전기적 특성
헬리콘
플라즈마
Electrical characteristics
Helicon
Plasmsa
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