To obtain a three axis precise motion, three actuators or one actuator and planar actuator have to be combined. But these approaches have several problems. So three DOF linear actuating mechanism which is capable of high precision motion is developed. Magnetic system generates magnetic flux path by permanent magnets and iron yokes. The magnetic circuit theory is applied to predict the magnetic flux density. The current directions of actuator are proposed to drive a moving coil by Lorentz force. The Position Sensitive Detector(PSD) sensors are used to measure the actuator position.
In order to maximize an acceleration performance under a given constraints, system parameters are varied. The working range of the actuating mechanism is ±1mm. The transfer functions for each axis are obtained experimentally. Also digital PID control scheme is used to control the motion of each axis. Maximum errors of each axis are bound within ±2㎛.