서지주요정보
초정밀 작업을 위한 6자유도 마이크로 스테이지의 개발 = Development of 6 degrees-of-freedom micro stage for ultraprecision positioning
서명 / 저자 초정밀 작업을 위한 6자유도 마이크로 스테이지의 개발 = Development of 6 degrees-of-freedom micro stage for ultraprecision positioning / 김경찬.
저자명 김경찬 ; Kim, Kyeong-Chan
발행사항 [대전 : 한국과학기술원, 1996].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8006061

소장위치/청구기호

학술문화관(문화관) 보존서고

MME 96010

SMS전송

도서상태

이용가능

대출가능

반납예정일

초록정보

A new 6 degrees-of-freedom micro stage, based on parallel mechanisms and actuated by using piezoelectric elements, has been developed for the application of micro positioning such as semiconductor manufacturing devices, high precision optical measurement systems, and high accurate machining. The micro stage structure consists of a base platform and an upper platform(stage). The base platform can effectively generates planar motion with yaw motion, while the stage can do vertical motion with roll and pitch motions with respect to the base platform. This separated structure has an advantage of less interference among actuators. The forward and inverse kinematics of the micro stage are discussed. Also, through linearization of kinematic equations about an operating point on the assumption that the configuration of the micro stage remains essentially constant throughout a workspace. To maximize the workspace of the stage relative to a fixed frame, an optimal design procedure of geometric parameters is shown. Hardware description and a prototype are presented. The prototype is about 150mm in height and its base platform is approximately 94mm in diameter. The workspace of the prototype is obtained by computer simulation. Kinematic calibration procedure of the micro stage and its results are presented.

서지기타정보

서지기타정보
청구기호 {MME 96010
형태사항 iii, 46 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Kyeong-Chan Kim
지도교수의 한글표기 : 곽윤근
지도교수의 영문표기 : Yoon-Keun Kwak
학위논문 학위논문(석사) - 한국과학기술원 : 기계공학과,
서지주기 참고문헌 : p. 44-46
주제 6자유도
마이크로 스테이지
압전소자
초정밀 운동
병렬 링크 구조
6 DOF
Micro motion
Micro stage
Parallel link mechanism
Piezoelectric element
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