서지주요정보
반도체 웨이퍼 가공 공정에서 흐름시간의 평균과 표준편차를 제어하기 위한 실시간 스케쥴링 방법 = A real-time scheduling methodology to control the mean and the standard deviation of the flow time in semiconductor wafer fabrication
서명 / 저자 반도체 웨이퍼 가공 공정에서 흐름시간의 평균과 표준편차를 제어하기 위한 실시간 스케쥴링 방법 = A real-time scheduling methodology to control the mean and the standard deviation of the flow time in semiconductor wafer fabrication / 윤현중.
저자명 윤현중 ; Yoon, Hyun-Joong
발행사항 [대전 : 한국과학기술원, 1999].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8009530

소장위치/청구기호

학술문화관(문화관) 보존서고

MME 99047

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초록정보

Due to the process characteristics and the complexity of the process flow, the wafer fabrication in semiconductor manufacturing is difficult to schedule using the methods applicable to other manufacturing systems. This thesis sets the flow time and the throughput rate as control targets, and proposes a real-time scheduling methodology including unexpected events such as machine breakdown and repair, etc. This thesis also presents a GSPN (generalized stochastic Petri nets) modeling and performance analysis of the wafer fabrication. The scheduling of the wafer fabrication consists of sequence control and input release control, the former for selecting a cassette to be processed in the available machine, the latter for determining the type and the time of a cassette to be released into wafer fab. In this thesis, OPNDD (operation due date) Rule and Regulation of the Buffer Length are used for the sequence control. Pre-Simulation and Feedback Control are used for the input release control. Pre-Simulation and Feedback Control are used for the input release control.

서지기타정보

서지기타정보
청구기호 {MME 99047
형태사항 ix, 60 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Hyun-Joong Yoon
지도교수의 한글표기 : 이두용
지도교수의 영문표기 : Doo-Yong Lee
학위논문 학위논문(석사) - 한국과학기술원 : 기계공학과,
서지주기 참고문헌 : p. 58-60
주제 반도체
웨이퍼 가공
흐름시간
실시간 스케쥴링
Semiconductor
Wafer fabrication
Flow time
Real-time scheduling
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