서지주요정보
RF magnetron sputtering 법으로 제조한 MgO 완충층과 Pt 박막의 (100) 배향성에 관한 연구 = A study on the (100) preferred orientation of the Pt thin films and MgO buffer layer prepared by RF magnetron sputtering
서명 / 저자 RF magnetron sputtering 법으로 제조한 MgO 완충층과 Pt 박막의 (100) 배향성에 관한 연구 = A study on the (100) preferred orientation of the Pt thin films and MgO buffer layer prepared by RF magnetron sputtering / 이창승.
발행사항 [대전 : 한국과학기술원, 1995].
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등록번호

8005759

소장위치/청구기호

학술문화관(문화관) 보존서고

MEM 95011

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리뷰정보

초록정보

The Pt thin films on MgO buffer layer were deposited by RF mgnetron sputtering method in order to make use of bottom electrode for highly oriented perovskite ferroelectric film to the c-axis. The MgO buffer layer was introduced to grow the Pt films with (100) orientation preferentially. The effects of deposition temperature of the Pt thin films and microstructure and crystalline quality of the MgO thin films to the (100) preferred orientation of the Pt films were investigated. Rocking curve full withs at half maximum(FWHM) were measured by XRD on the MgO(200) reflection to characterize the tilt misalignment of the MgO grains. The MgO films deposited on Si(100) wafer were grown with preferred (100) orientation and MgO film deposited at 425℃ showed high crystalline quality with refractive index of 1.725 at 6728Å which was close to that of MgO bulk crystalline. The MgO(200) peak intensity was increased significantly after RTA treatment in oxygen environment, but crystalline quality of MgO films was not enhanced by RTA treatment. The (100) orientation of the Pt thin film growth on MgO buffer layer displayed a strong sensitivity to the thickness of the MgO films as crystalline quality and surface roughness of the MgO films were varied with film thickness. Low growth rate and high deposition temperature of the Pt film were required to grow Pt films with (100) orientation preferentially.

서지기타정보

서지기타정보
청구기호 {MEM 95011
형태사항 [iv], 65 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Chang-Seung Lee
지도교수의 한글표기 : 위당문
지도교수의 영문표기 : Dang-Moon Wee
학위논문 학위논문(석사) - 한국과학기술원 : 전자재료공학과,
서지주기 참고문헌 : p. 63-65
주제 Sputtering (Physics)
Thin films.
Orientation.
마그네트론 스퍼터링. --과학기술용어시소러스
금속 박막. --과학기술용어시소러스
우선 방위. --과학기술용어시소러스
미세 구조. --과학기술용어시소러스
Buffer layer
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