In order to respond to the increasing demands of ultraprecision positioning mechanism in the field of precision engineering, more accurate stages are needed whose positioning uncertainty should be in the unprecedented level of nanometers, while maintaining a long travel range. For this application, most conventional stage mechanisms are found not suitable, so the concept of dual servo, which uses two different servos, is one of the new design and control strategies being extensively investigated these days. This paper presents a fine motion mechanism as a part of research on the dual servo control. The stage is made of a single structure of elastic flexure, whose xyθ motions are induced in the form of elastic deformation activated by three piezoelectric actuators. Experimental results prove that the translational and rotational motions of the stage can be controlled with resolution of 5 nanometers and 0.1 arcsec, respectively.
