In general, ellipsoidal driving motion of ultrasonic motor have not been exactly analysed due to the microscopic operating behavior.
In this paper, precise linear positioning mechanism was designed and manufactured with two piezoelectric elements combined with right angle. Various behaviors of slider were observed for several ellipsoidal motions and driving conditions. Using stick-slip laws, its mechanism is modelled. Using simulation and experiment, its model is verified. Effect of sinusoidal driving signal and parameters on the behavior of the mechanism was compared with the effect of trapezoidal driving signal.
