Active micro-vibration control of a 2DOF structure, which simulates a lithography stepper device, is performed using a pair of piezoelectric actuators. The control aims at reducing the translational and rotational vibrations of the upper plate when the system is subject to disturbance and undergoes impulsive transient motion. Using the experimentally determined model, lead compensation and optimal control schemes are adopted so that the damping of the closed-loop system is effectively increased, and compared. It is found that the optimal control scheme has more effective and the predicted control performance is in good agreement with the experimental results.