With the development of CVD methods for diamond, various CVD techniques have opened a new era in the applications of optical and thermal systems.
But in these applications,the most important problem is surface roughness. Because most of films deposited by CVD methods have rough surface,which is less effective in optical or thermal application. And so the diamond film with smooth surface was tried to deposit,namely (100)plate-like shape film using FACVD. Although perfect (100)plate-like shape wasn't deposited in this experiment,the result of this research presented the possibility that the diamond film with the perfect (100) plate-like shape(heteroepitaxial film) can be deposited.
Direct polishing method was tried as a solution of rough surface problems. A thermochemical polishing technique(hot-iro n plate method) was employed to reduce surface roughness Ra=0.83㎛ to 200Å on the surface of diamond films from FACVD onto Si,Mo substrate.
But through the surface analysis it was apparently revealed the fact that on the polished surface after polishing there were residual Fe atoms.
Especially SIMS analysis indicated residual Fe element below 1 atomic %. So more research is requested in order to know what this redidual Fe element influences on the intrinsic physical properties of diamond films deposited by CVD technique after polishing(FACVD in this research)
