Bi-Sr-Ca-Cu-O system superconductor films were deposited by MOCVD. As a precursor $Bi(ph)_3$, $Sr(dpm)_2$, $Ca(dpm)_2$ and $Cu(dpm)_2$ metalorganic sources were used. Compositions of the deposited films could be controlled by adjusting source evaporation temperature. The low-$T_2$(2212) phase could be prepared but as the film composition deviates from 2212 composition, 2201 and other phases were formed together with 2212 phase. It was impossible to get high-$T_c$(2223) phase by adusting compositions of the films.
The films were deposited on MgO and $LaAlO_3$ substrate. The film deposited on $LaAlO_3$ which had lesser lasser mismatch showed higher $T_c$ as expected. The film deposited on MgO substrate became superconducting at 64K and at 69K in case of $LaAlO_3$. $T_c$ of the films increased after annealing treatment. The films deposited on $LaAlO_3$ substrate were annealed and had $T_c$ of 74K that was higher than 69K of non-annealed film. We had also tried vacuum annealing which was generally known to be effective on improving the superconducting properties of 2212 phase, but we couldn't get an appropriate condition.
