서지주요정보
GaAs 모노리딕 되먹임 증폭기의 설계 및 제작 = Design and fabrication of GaAs monolithic feedback amplifier
서명 / 저자 GaAs 모노리딕 되먹임 증폭기의 설계 및 제작 = Design and fabrication of GaAs monolithic feedback amplifier / 신현철.
발행사항 [대전 : 한국과학기술원, 1993].
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소장정보

등록번호

8003940

소장위치/청구기호

학술문화관(문화관) 보존서고

MEE 93046

휴대폰 전송

도서상태

이용가능(대출불가)

사유안내

반납예정일

리뷰정보

초록정보

A monolithic microwave integrated circuit fabrication techinques suitable for a wideband amplifier have been designed and developed. The designed process utilizes MESFET's fabricated on the MOCVD grown epitaxial layer with 1mm gate length, dielectric material of ECR-$Si_3N_4$ or sputtered $SiO_2$ with film thickness of 2000$\mbox{\AA}$ NiCr thin film resistor and air bridge formed by Auelectro-plating. The process has 9 mask levels. The developed process was proven to be applicable to MMIC implementation by successfully fabricating active and passive elements such as MESFET's inductors, capactiors and resistors. A GaAs wideband feedback amplifier was designed and successfully fabricated using the developed process. The amplifier has a single-stage configuration with one MESFET, three inductors, one resistor and one capacitor. The perfomance of the amplifier was measured using on-wafer probing techniques with 8510B automatic network analyzer. The amplifier has 6.5dB power gain with 0.2dB gain flatness over the 3-dB bandwidth from below 0.5GHz to 5.1GHz. The maximum input and output VSWR are 3.5 and 1.8 respectively over the operating frequency range. The amplifier chip size is 1.1x0.7mm$^2$.

서지기타정보

서지기타정보
청구기호 {MEE 93046
형태사항 [ii], 58 p. : 삽화 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Hyun-Chol Shin
지도교수의 한글표기 : 권영세
지도교수의 영문표기 : Young-Se Kwon
학위논문 학위논문(석사) - 한국과학기술원 : 전기및전자공학과,
서지주기 참고문헌 : p. 57-58
주제 Gallium arsenide semiconductors.
Feedback amplifiers.
Microwave integrated circuits.
Epitaxy.
Metal semiconductor field-effect transistors.
비소화갈륨. --과학기술용어시소러스
귀환 증폭기. --과학기술용어시소러스
모놀리식 집적회로. --과학기술용어시소러스
마이크로파 집적회로. --과학기술용어시소러스
MOCVD. --과학기술용어시소러스
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