An application of Scanning Tunneling Microscopy (STM) is the measurement of 3-dimensional profiles of the micro-patterns. Special emphasis of this investigation is given to extrending the measuring ranges of STM upto the order of several micrometers while maintaining superb nanometer measuring resolution. This is accomplished by correcting hysteresis effects of piezoelectric actuators by using non-linear compensation models and organizing tracking-control-circuit of dual-gain and scanning-control-circuit for variable scanning velocity. Tip for STM is fabricated by electric-etching. Detail aspects of design and control of a prototype measurement system are described with some actual measuring examples in which fine IC patterns and polygon-mirror can successfully be traced with a resolution of 1 nanometer over a surface range of 6×3 micrometers.
