In order to generate a spot array, a 2-D array of diffractive leslets and a Dammann grating were designed and fabricated. These microoptic components could be used to distribute optical power onto two-dimensional arrays of optical logic devices for optical computing purposes. The lenslet is based on the diffraction of light at a Fresnel phase plate. The Fresnel phase plate pattern was implemented as a phase structure with four discrete levels. The diffraction efficiency was calculated to be 81% for this case. Each lenslet has a rectangular aperture and a size of 0.5mm × 0.5mm ~ 2.5mm × 2.5mm. Dammann grating also gives the spot array. The transition points were optimized in a four level phase structure for the generation of uniform spots. The 5 × 5 spot arrays were obtained by using this four-level grating. The efficiency of this phase grating can be improved by increasing the number of phase levels in diffraction gratings. The multi-phase level was produced by depositing thin films of silicon monoxide on a cover glass substrate and by using Photolithoraphic techniques.