The fast cooling effects on compensated amorphous silicon films have been studied. For ($PH_3=5000ppm$, $B_2H_6=500ppm$) compensated films, the dark conductivity is increased after fast cooling, and the excess dark conductivity relaxes slowly in the form of stretched exponential function. For (500,500) compensated films, the dark conductivity is not increased after fast cooling. Thermal equilibration processes in compensated amorphous silicon films are discussed mainly through hydrogen motions. It is concluded, therefore, that (5000,500) compensated films have the electronic properties similar to n-type films and (500,500) compensated films have the electronic properties similar to undoped amorphous films.
