A laser beam direct writing system has been built and characterized to make patterns of optical integrated circuits. This system is composed of XY translational stages and their computer interface board, a laser beam intensity control part, a power monitoring part, and focusing optics. The system may be also used for alignment and patterning of electrodes.
As application of this laser beam direct writing system, $LINbO_3$ optical waveguide X-switch has been fabricated on Y-cut crystal.
