The heterojunction a-Sic:H/a-Si:H PIN solar cells were fabricated by glow discharge decomposition in order to study the effects of P-layer deposition temperature and optical enhancement by textured substrate. The optimum deposition temperature was observed to be 270℃.
The short circuit current density was increased by 7-8% by using textured substrate. We also increased the short circuit current density by 8-10% by using highly reflecting Ag back electrode.
The increase of quantum efficiency in the long wavelength regions has been verified by the measurements of the spectral response.