This study concerns with the topographical profile measurement for mirror surface based upon an optical technique called the phase measuring interferometry. Main emphasis has been given to the development of the measurement system hardware and software and following results is obtained.
1) A measuring principle for the fine surfaces whose height variations are in the range of sub-micrometers has been established by adopting the phase measuring principles.
2) A Prototype measuring system has been built by making the most of the latest optical and electronic equipment.
3) An algorithm has been developed which can derive the surface height profile from the measuring fringe patterns.
As a result, total measurement system is developed and actual measurement is performed successfully.