We try to prepare a good quality YBCO thin film on MgO poly-crystalline substrate by MOCVD method using metal β-diketonate precusors. Generally, it is not easy to control carrier gas flow, substrate temperature distribution and stochiometry of gas flow in CVD method. These problem affect the properties of the film.
In our experiment, surface uniformity is not good. But XRD data and resistance-temperature curve show that the c-axis oriented film was grown and it transit to superconducting phase. The transition temperature is about 80K.
Our result is that for a good quality YBCO thin film, it must be tried to perpare the film by carrier gas-free MOCVD method. In this method, the problem of substrate temperature non-uniformity can be erased. We suggest a carrier gasfree MOCVD method using effusion cell control.
