It was well-known that single-ion impacts on the graphite surface create hillocks. The dependence of the size of the hillocks (base plane) on the energy and the incidence angle of colliding ions has been studied.
The size of hillocks created on the graphite surface was not varied significantly as the energy of ion impact increased. This result could be explained by the fact that the collision cascade ocurred at the deeper layer of the graphite increasing the ion impact energy.
The size of hillocks increased as the incidence angle was changed from 0° to 60°, but it decreased at the region of grazing angle (80°). We concluded that the abnormal decrease at 80° was attributed to the reflection of colliding ions.
