서지주요정보
레이저 디스플레이용 광스캐너의 설계 및 제작에 관한 연구 = A study on the design and fabrication of silicon optical scanner for laser display
서명 / 저자 레이저 디스플레이용 광스캐너의 설계 및 제작에 관한 연구 = A study on the design and fabrication of silicon optical scanner for laser display / 이진호.
저자명 이진호 ; Lee, Jin-Ho
발행사항 [대전 : 한국과학기술원, 2003].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8014358

소장위치/청구기호

학술문화관(문화관) 보존서고

DMS 03014

SMS전송

도서상태

이용가능

대출가능

반납예정일

초록정보

To use a scanning mirror for laser display, the size of the mirror must be larger than that of the laser beam and the laser beam must be scanned linearly with analog operation to produce an undistorted image. To control a scanning mirror of such a large size, a large driving force is also required. As a method of satisfying such requirements for laser display, a 1500μm × 1200 μm silicon scanning mirror having vertical comb fingers has been designed, fabricated and characterized. It is a vertically driven electrostatic actuator and an electrostatic force is generated by the interdigitated comb fingers. It is composed of two structures having vertical comb fingers. The upper structure is composed of a scanning mirror plate, two torsion bars, a supporting frame and vertical comb fingers (moving electrodes). The lower structure is composed of vertical comb fingers (fixed electrodes), a supporting frame and gold signal lines and pads on the Pyrex glass substrate. The fabrication processes of a scanning mirror are mainly composed of three steps : fabrication of the upper structure, fabrication of the lower structure and assembly of the upper and lower structures. The vertical comb fingers of the upper and lower structures were fabricated by deep inductively coupled plasma reactive ion etching (ICPRIE). By flip chip bonding, the upper and lower structures having vertical comb fingers were assembled. In this assembling process, electroplated AuSn was used as an eutectic bonding material with a melting temperature of 278℃. To improve the reliability of the scanning mirror, a silicon-on-insulator (SOI) wafer was used and the uniform thickness of torsion bars was obtained by using a buried oxide layer as an etch stop. The open loop responses were measured using a laser doppler vibrometer (LDV) according to the input signal wave forms and the deflection angle was measured according to the control voltage with the dc bias voltages. As a result, the scanning mirror was controlled perfectly by the ramp wave form of 60 Hz with the duty cycle of 90 % and showed a very linear actuating performance. We obtained the resonant frequency of 1. 353 kHz, and the scan angle of 12° (optical) when driven by the 28 V ac control voltage of a 60 Hz sine wave with the 35 V dc bias voltages. Using two scanning mirrors, a two-dimensional laser vector graphic video image, which was drawn from point to point, was obtained successfully. Vector image signals from the graphic board were applied to two scanning mirrors, and a SHG green laser was directly modulated to shape independent graphic images. In conclusion, this scanning mirror can be used as a galvanometric vertical scanner to make the laser display system compact and effective.

서지기타정보

서지기타정보
청구기호 {DMS 03014
형태사항 xi, 109 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Jin-Ho Lee
지도교수의 한글표기 : 전덕영
지도교수의 영문표기 : Duk-Young Jeon
수록잡지명 : "Characterization of silicon scanning mirror for laser display". Japanese journal of applied physics, v.41 no.9, pp. 5853-5857 (2002)
수록잡지명 : "SOI-based fabrication processes of the scanning mirror having vertical comb fingers". Sensors and actuators A, v.A102 pt.1-2, pp. 11-18 (2002)
학위논문 학위논문(박사) - 한국과학기술원 : 재료공학과,
서지주기 참고문헌 : p. 101-109
주제 광스캐너
레이저 디스플레이
수직 빗살
optical scanner
laser display
vertical comb
scanning mirror
laser TV
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