Heterodyne Laser Interferometers are popularly being used in many modern ultra precision machines. Needs of the high speed and the high resolution measurement of heterodyne laser interferometers are improved continuously by the growth of the electronics' advancements. A new phase measuring algorithm of heterodyne laser interferometers provides a good properties of heterodyne interferometer system. The new designed interferometer system has a simple electronics and a ultra high velocity limitation. Although velocity limitations are very improved, constant phase resolution are approved. Current experiment settings are proposed 2.2m/s velocity measurement and 1.5nm resolution.
