서지주요정보
Nano-indenter에 의한 폴리머의 기계적 특성에 관한 연구 = Characterization on mechanical properties of polymer by Nano-indenter
서명 / 저자 Nano-indenter에 의한 폴리머의 기계적 특성에 관한 연구 = Characterization on mechanical properties of polymer by Nano-indenter / 이혁재.
저자명 이혁재 ; Lee, Hyuck-Jae
발행사항 [대전 : 한국과학기술원, 2001].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8011804

소장위치/청구기호

학술문화관(문화관) 보존서고

MMS 01025

SMS전송

도서상태

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대출가능

반납예정일

초록정보

In microelectric packaging , polymer thin films are commonly used as dielectric materials. But mechanical properties of polymer are generally difficult to know, because of the time-dependent properties. Additionally, the mechanical properties of polymer thin film are not easily characterized by uniaxial tension or compression test. The relation between load and displacement obtained from Nano-indentation method gives a lot of information on the mechanical properties of thin films like stress-strain relation. PIQ(Polyimide), Poly(imide-siloxane), BCB(Benzocyclobutene) were coated on silicon wafer by spin coating, and soft baking was followed on hot plate and then hard baking was carried out in a temperature-controlled condition. The mechanical properties of polymer, such as visco-elasticity, and viscous flow, are time-dependent. Therefore it is necessary to conduct a time-dependent test in order to obtain the mechanical properties of polymer. Creep test was conducted to evaluate the mechanical properties of polymer thin film using Nano-indenter. From result, creep was followed by behavior of 4-element model (Burgers model). So, Creep equation can be obtained from Sneddon’s equation and constitute equation. The resultant data from creep test was compared with CSM(Continuous Stiffness Method) Data to prove reliable. The time-dependent mechanical properties of polymer thin films from creep test showed no load-dependence within linear visco-elastic range. The effects of curing temperature on the mechanical properties were also investigated using the above creep model.

서지기타정보

서지기타정보
청구기호 {MMS 01025
형태사항 52, [4] p. : 삽도 ; 26 cm
언어 한국어
일반주기 부록 수록
저자명의 영문표기 : Hyuck-Jae Lee
지도교수의 한글표기 : 유진
지도교수의 영문표기 : Jin Yu
학위논문 학위논문(석사) - 한국과학기술원 : 재료공학과,
서지주기 참고문헌 : p. 51-52
주제 기계적 특성
폴리머
mechanical properties
nano-indenter
nano-indentation
polymer
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