High precision positioning system is widely used in industrial application, that is, semiconductor industry, automation industry and machining tool industry. In such area, positioning system requires various stroke, high resolution and short positioning time. To satisfy these purposes high precision positioning system can be constructed either dual servo system or one servo system. Dual servo system is the consolidation of systems for short stroke and for long stroke. But One servo system is made up of one actuator to achieve the purposes of high precision system. This system has simpler structure and is easier to control than that system. This paper handles the contents of one servo type system which is consisted of voice coil actuator and air bearing guide. Most part of effort devoted to this paper is intended to reduce the positioning time especially in view of design and control. In design step design criterion based on the bang bang control is applied for the system to have short positioning time. System and parameter modelling is performed before system construction and parameter estimation to correct the modelling error is followed. Gain scheduling control method based on the TDC(Time Delay Control) is applied in control step. Reference model gain of TDC is varied according to the real time state in the system control process. By this method high gain control which made the system have high disturbance rejection ability can be performed in the fine error region. And low gain control considering the actuator saturation limit to prevent wind up phenomena is performed in large error region. The gain scheduling control method proposed by this paper can reduce the positioning time and increase the disturbance rejection ability of the one servo type high precision positioning system.
