The small material removal rate of elastic emission machining (EEM) becomes a serious problem due to using fine powder particles for obtaining finished surfaces of high quality. If a cylindrical polyurethane-wheel is used as a tool for accelerating powder particles, the efficiency of machining may be increased through enlarging the machining region and increasing the surface velocity of the wheel. It requires much trial and error to make an experiment in combination of several conditions. Therefore, results, which are qualitative even if not quantitative, may be predicted and the efficiency of the experiment can be increased if pre-simulation is carried out before the experiment. If these analytical results are compared with experimental ones, characteristics of EEM using polyurethane-wheel can be clarified.
In this study, the material removal rate are predicted through modeling and analyzing EEM using cylindrical polyurethane-wheel. Effects of this method on the surface roughness and the material removal rate were verified through experiments under various conditions and compared with ones from analyses of EEM. The high-efficient finishing of silicon wafer has been also carried out using this method.
